MIRA XI
Large-chamber scanning electron microscope
- Size of specimen
- max. diameter
- 400 mm
- max. height
- 400 mm
- max. weight
- 300 kg
Analytical devices / detectors
- Secondary electrons detector (SE-Detector)
- Backscattered electrons detector (BS-Detector)
- Energy dispersive X-ray spectroscopy (EDX)
- High-speed secondary electrons detector (HSSE-Detector)