Alicona InfiniteFocus G5 incl. Advanced Real3D Rotation Unit

Optical Form and Surface Roughness Measurement Device

Measurement method
Focus-Variation
Objective magnification
5x, 10x, 20x, 50x, 100x
Lateral resultion
0.44 µm (with 100x)
Vertical resultion
10 nm (with 100x)
Working distance
4.5 mm (with 100x)
Measureable hight
4 mm (max. with 100x)
Measureable flank angle
87°
Specimen guiding
Motorized table and rotation unit (Real3D):
  • 3 linear axes
  • 2 rotatory axes (360° and 90°)
Light/Lightsource
LED coaxial light and LED ring light segmentally controled (24 segments)