Alicona InfiniteFocus G5 incl. Advanced Real3D Rotation Unit

Optical Form and Surface Roughness Measurement Device

Measurement method
Objective magnification
5x, 10x, 20x, 50x, 100x
Lateral resultion
0.44 µm (with 100x)
Vertical resultion
10 nm (with 100x)
Working distance
4.5 mm (with 100x)
Measureable hight
4 mm (max. with 100x)
Measureable flank angle
Specimen guiding
Motorized table and rotation unit (Real3D):
  • 3 linear axes
  • 2 rotatory axes (360° and 90°)
LED coaxial light and LED ring light segmentally controled (24 segments)